On the reproducibility of electron-beam lithographic fabrication of photonic nanostructures

Nature Scientific Reports has published an article by Sahoo et Al on the usage of photonic nanostructures for novel functionalities, which often involves e-beam lithography. A key problem with this is the lack of ability to achieve a desired operating wavelength.

The research examines and demonstrates how to improve this issue by developing processes to achieve consistency across various factors which provides “useful guidelines for fabricating nanostructures more reliably and to achieve a higher success rate in exploratory experiments.”

Silson’s silicon nitride coated substrates were used for the sensor fabrication process

Follow this link to read about the research!