Silson Products


Anisotropic etching of silicon nitride coated wafers and subsequent removal of the free-standing membrane is an excellent method of producing silicon apertures.

The rear of the apertures have sloping side walls, corresponding to the (111) planes of the silicon crystal lattice as described here.

Typical designs are shown in the table below although our apertures can be produced in any orthogonal shape subject to minimum order quantities. A number of popular designs are usually available from stock.

Frame Size5.0 x 5.0 mm
7.5 x 7.5 mm
10.0 x 10.0 mm
17.5 x 17.5 mm
Frame Thickness100 µm
200 µm
381 µm
525 µm
Aperture Size (for example)0.1 x 0.1 mm
0.25 x 0.25 mm
0.5 x 0.5 mm
1.0 x 1.0 mm
2.0 x 2.0 mm
3.0 x 3.0 mm
4.0 x 4.0 mm
5.0 x 5.0 mm and so on …

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