Development of EUV interference lithography for 25 nm line/space patterns

Micro and Nano Engineering have published an article by Sahoo et Al about EUV interference lithography. The introduction reads: “recently, various lithography methods were developed to increase integration levels as well as microchips performance metrics by reducing the dimension of active components, thereby strengthening recent advances in modern semiconductor technology”.

Silson’s silicon nitride membranes were used for the experiments which were performed at Taiwan Light Source 21B2 EUV beamline in the National Synchrotron Radiation Research Center (NSRRC).

Follow this link to read more about the research in full!

Case studies

Ionic Modulation of Ferromagnetic and Proximity-Induced Magnetization in Co/Pd Heterostructures

Ionic Modulation of Ferromagnetic and Proximity-Induced Magnetization in Co/Pd Heterostructures

Advanced Functional Materials published by Wiley-VCH GmbH has released an article by Kossak et Al on understanding t...

Double-sided van der Waals epitaxy of topological insulators across an atomically thin membrane

Double-sided van der Waals epitaxy of topological insulators across an atomically thin membrane

arXiv has published an article by Park et Al about epitaxial growth of quantum heterostructures using atomically thi...

Inverted nucleation for photoinduced nonequilibrium melting

Inverted nucleation for photoinduced nonequilibrium melting

Science Advances has published an article by Hwang et Al about the study of non-equilibrium phase transitions by lin...

In Situ Formation of Suspended Graphene Windows for LabBased XPS in Liquid and Gas Environments

In Situ Formation of Suspended Graphene Windows for LabBased XPS in Liquid and Gas Environments

The European Society Journal for Catalysis by Chemistry Europe has published an article by Jones et Al about their g...

Competing anisotropies in the chiral cubic magnet Co8Zn8Mn4 unveiled by resonant x-ray magnetic scattering

Competing anisotropies in the chiral cubic magnet Co8Zn8Mn4 unveiled by resonant x-ray magnetic scattering

arXiv has published an article by Ukleev et Al about the use of x-ray resonant magnetic small-angle scattering to in...

Vortex motion in reconfigurable three-dimensional superconducting nanoarchitectures

Vortex motion in reconfigurable three-dimensional superconducting nanoarchitectures

arXiv has published an article by Zhakina et Al on their research involving the harnessing of 3D nanopatterning in o...

On the reproducibility of electron-beam lithographic fabrication of photonic nanostructures

On the reproducibility of electron-beam lithographic fabrication of photonic nanostructures

Nature Scientific Reports has published an article by Sahoo et Al on the usage of photonic nanostructures for novel ...

Nanoscintillator Coating: A Key Parameter That Strongly Impacts Internalization, Biocompatibility, and Therapeutic Efficacy in Pancreatic Cancer Models

Nanoscintillator Coating: A Key Parameter That Strongly Impacts Internalization, Biocompatibility, and Therapeutic Efficacy in Pancreatic Cancer Models

Small Science published by Wiley-VCH GmbH has released an article by Fulbert et Al about the study of nanoscintillat...

Native cryo-correlative light and synchrotron X-ray fluorescence imaging of proteins and essential metals in developing neurons

Native cryo-correlative light and synchrotron X-ray fluorescence imaging of proteins and essential metals in developing neurons

ChemRxiv has published an article by Ortega et Al about the study of cellular functions of essential metals. The abs...